High-performance surface acoustic wave devices using composite substrate structures
نویسندگان
چکیده
Abstract In this paper, first, the surface acoustic wave (SAW) propagation mode and a method of analyzing property are introduced briefly. Then, typical composite substrate structures that have been developed to obtain high-performance SAW devices reviewed. Furthermore, recent results obtained by author research colleagues on resonance properties leaky (LSAW) longitudinal-type LSAW dissimilar-material bonded comprising LiTaO 3 (LT) or LiNbO thin plate with thickness less than 1 ? ( ? wavelength) quartz described. The control attenuation cause large coupling factor LSAWs utilizing layered were also discussed. For 4 inch wafer 36°YX-LT/AT90°X-quartz thin-plate 0.3 , an admittance ratio 81 dB, fractional bandwidth 4.2%, antiresonance factors approximately 1500 markedly improved compared single 36°YX-LT experimentally at 2.2 GHz.
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ژورنال
عنوان ژورنال: Japanese Journal of Applied Physics
سال: 2021
ISSN: ['0021-4922', '1347-4065']
DOI: https://doi.org/10.35848/1347-4065/abf2d9